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发明名称
VAPOR GROWTH METHOD FOR III-V COMPOUND SEMICONDUCTOR WITH ORGANOMETALLIC COMPOUND
摘要
申请公布号
JPH0426597(A)
申请公布日期
1992.01.29
申请号
JP19900129298
申请日期
1990.05.21
申请人
SUMITOMO ELECTRIC IND LTD
发明人
SHIMAZU MITSURU;SHIRAKAWA FUTATSU
分类号
C30B29/40;H01L21/205
主分类号
C30B29/40
代理机构
代理人
主权项
地址
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