| 摘要 |
PURPOSE:To prevent dielectric breakdown of a light-shielding film by peeling the pellicle film under an atmosphere containing ions generated by an ionizer. CONSTITUTION:The pellicle film 2 is peeled from a reticle 1 or a mask under an atmosphere containing ions generated from the ionizer 4. The ions generated from the ionizer 4 effectively acts only for liberating electric charge present on the pellicle film 2 without charging the pellicle film 2. The ionizer need to be operated only when the pellicle film 2 stuck to the side of the light- shielding film pattern 1A on the reticle 1 or the mask is removed, and there is especially no problem even if the ionizer 4 is located on the reverse side of the light-shielding film pattern 1A, thus permitting the breakdown of the pellicle film 2 due to static electricity to be prevented at the time of removing the pellicle film 2. |
