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发明名称
DEPOSITION OF METAL FILM
摘要
申请公布号
JPH05299374(A)
申请公布日期
1993.11.12
申请号
JP19920102696
申请日期
1992.04.22
申请人
TOSHIBA CORP
发明人
ARIKADO TSUNETOSHI
分类号
H01L21/285;H01L21/28;(IPC1-7):H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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