发明名称 LAMINATED PLATE FOR HOLDING POLISHING OBJECT AND HOLDING MEMBER OF POLISHING OBJECT
摘要 <P>PROBLEM TO BE SOLVED: To provide a laminated plate for holding a polishing object, which has improved strength capable of enduring a load of polishing and improved wear resistance, and a holding member of the polishing object using this laminated plate. <P>SOLUTION: The laminated plate is formed by impregnating an epoxy resin composite varnish into a glass cloth, drying it to obtain a pre-preg, overlapping prescribed number of the pre-pregs, and hot-press-molding them so as to be integrally molded, wherein a thickness of each pre-preg is less than 100 &mu;m, and the epoxy resin composite varnish and/or the glass cross contains an inorganic filling material. The holding member for the polishing object is manufactured by using this laminated plate. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008254149(A) 申请公布日期 2008.10.23
申请号 JP20070101626 申请日期 2007.04.09
申请人 SUMITOMO BAKELITE CO LTD;AATORAITO KOGYO KK 发明人 MORITA NAOHIRO;NINOMIYA YASUO
分类号 B24B37/30;B24B41/06;H01L21/304 主分类号 B24B37/30
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