发明名称 TESTING METHOD AND IC TESTER OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To achieve a testing method and IC tester of a semiconductor integrated circuit capable of detecting a short between pins even when it is not a complete short. SOLUTION: In the testing method of the semiconductor integrated circuit for detecting a short between pins of the semiconductor integrated circuit having a plurality of pins, the IC tester or the semiconductor integrated circuit generates a pulse or step signal in a desired pin of the semiconductor integrated circuit, and the IC tester determines a short between pins based on the waveform from the pin of the semiconductor integrated circuit adjacent to the desired pin. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008256632(A) 申请公布日期 2008.10.23
申请号 JP20070101334 申请日期 2007.04.09
申请人 YOKOGAWA ELECTRIC CORP 发明人 NAGANUMA HIDEKI
分类号 G01R31/02;H01L21/822;H01L27/04 主分类号 G01R31/02
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