INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE

摘要

An inertia force sensor includes a detection element (1) having an acceleration detection section. The detection element (1) has two perpendicular arms formed by connecting first arms (8) and second arms (10) in perpendicular directions, a support section (12) for supporting one end of each of the two first arms (8), a fixation section (4) to which the other end of each of the two first arms (8) is connected, and weight sections (2) fixed to the forward ends of the second arms (10). The thickness of the first arms (8) is set less than the thickness of the second arms (10) and weight sections (2), and as a result, the sensor has enhanced detection sensitivity.