GENERATOR FOR ATMOSPHERIC PLASMA

摘要

An atmospheric plasma generation apparatus is provided to maintain strength of a lower electrode by forming a plasma emission structure with a plurality of inclined slits. An upper electrode is positioned on an upper dielectric layer. A high voltage is applied to the upper electrode. A lower electrode(10) is positioned on a lower dielectric layer(20) at a predetermined interval from the upper dielectric layer. A plurality of plasma emission holes(30) are formed at the lower dielectric layer and the lower electrode. The plasma emission holes are inclined slits which are positioned along a longitudinal direction of the lower electrode and are overlapped with each other in a width direction of the lower electrode.