| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a portion between adjacent exposure regions, out of a plurality of exposure regions set on an exposure object along its carrying direction from being exposed. <P>SOLUTION: An exposure apparatus is disclosed that is equipped with: a stage 5 which mounts and carries a color filter substrate 1; a mask stage 6 which holds a photomask 14 close to and opposing to the color filter substrate 1; a light source 7 which is turned on through an exposure period and irradiates the photomask 14 with exposure light; a photo-integrator which homogenizes the luminance distribution of the exposure light irradiating the photomask 14; a condenser lens 9 which converts the exposure light into parallel beams to irradiate the photomask 14; an imaging lens 10 which generates an end face image of the photo-integrator 8 in a front side of the condenser lens 9; and a shutter 11 which is disposed near the imaging position of the imaging lens 10 and switches between irradiation and blocking of the exposure light as synchronizing the successive passing of a plurality of exposure regions 2 below the photomask 14 by the movement of the color filter. <P>COPYRIGHT: (C)2007,JPO&INPIT |
