| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer film structure which has high adhesive strength with a base material, and can withstand abrasion and corrosion. SOLUTION: The diamond-like carbon film in this invention is a multilayer film having an n layer structure. The value of the n is 6 to 30. The diamond-like carbon comprises carbon, hydrogen and an X element as the components in each layer; wherein, the X is the one selected from chromium, titanium, an alloy of chromium and titanium, and chromium nitride, and also, the atomic percentage of the X component in each layer gradually reduces from the first layer to the n-th layer. The m-th layer in the diamond-like carbon film is a-C:H:(n-m+1)X, and the value of m is 1 to n. The diamond-like carbon film is used in regions such as a mold, a cutter and a magnetic recording medium as a protective film. COPYRIGHT: (C)2007,JPO&INPIT |
