发明名称 NANOPARTICLE IMPLANTATION
摘要 A method for forming a coating of nano-sized material on the surface of another material using a micromachining bead-blasting machine for implantation of nanoparticles is disclosed. The method can be practiced with a wide range of target materials, nanoparticles (such as carbon-nanotubes, CNTs), and environmental conditions, using a wide range of carrier bead sizes and materials, or without carrier beads. The claimed implantation method can be used to fabricate a surface-activated CNT-cathode for use in a field emission device. The implantation method can also be used for chemically reacting any of the materials present near the point of impact with each other.
申请公布号 KR20070047287(A) 申请公布日期 2007.05.04
申请号 KR20077001709 申请日期 2005.06.28
申请人 NANO-PROPRIETARY, INC. 发明人 YANIV ZVI;FINK RICHARD L.;YANG MOHSHI
分类号 H01L21/265;B82B1/00;B82B3/00 主分类号 H01L21/265
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