Holder for supporting objects such as electronic components during separation using laser, comprises gas permeable flexible layer located above suction holes in support

摘要

The holder (1) comprises a dimensionally stable support (2) with a flat side containing suction holes (7) and a gas-permeable flexible material layer (8) located on this flat side. The support and flexible layer at least partially comprise a material which does not absorb laser radiation (10). The support is a plate and the flexible layer comprises a perforated film or a fibrous web. An independent claim is also included for a method for supporting objects (9) with this holder during separation of these objects with the aid of laser light, comprising the following steps: (A) securing the flexible layer to the support so that it is supported by the latter; (B) placing the objects on the flexible layer; (C) applying suction to the underside of the flexible layer; and (D) separating the objects using laser light, which can pass through the flexible layer and support.