| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container capable of suppressing the breakage of a substrate as well as facilitating the ejection operation by returning the substrate to the regular position of teeth. SOLUTION: The substrate storing container is provided with a container body for storing a semiconductor wafer W, two or more teeth for supporting the semiconductor wafer W almost horizontally which is allocated in the internal both sides of the container body, a rear retainer for supporting the rear periphery of the semiconductor wafer W via a support groove 32, and a lid for opening and closing the front face configuring the aperture of the container body. Furthermore, at the back of two or more teeth, two or more guide grooves 50 for guiding the semiconductor wafer W to an up and down direction are formed by bringing a slope 51 into contact with the periphery of both sides of the semiconductor wafer W when closing engagement of the container body by means of the lid. The oblique angle of the slope 51 for forming each guide groove 50 is set less than that of a slope 33 consisting of the support groove 32 of the rear retainer 30. COPYRIGHT: (C)2006,JPO&NCIPI |
