发明名称 Vacuum treating device with lidded treatment container
摘要 A vacuum treating device, comprising a treatment container having a container body ( 111 ) and a lid ( 112 ) and allowing an internal pressure to be reduced and a lid support mechanism ( 130 ), wherein an upper opening ( 111 a) formed in the container body can be closed airtight by the lid ( 112 ). The lid support mechanism ( 130 ) opens and closes the upper opening ( 111 a) of the container body by moving the lid ( 112 ) so as to be translatingly moved in the vertical direction and, when the lid ( 112 ) is moved upward from the container body ( 111 ), supports the lid ( 112 ) so as to be rotated around a vertical axis disposed around the lid.
申请公布号 US2006099053(A1) 申请公布日期 2006.05.11
申请号 US20050544708 申请日期 2005.08.05
申请人 TOKYO ELECTRON LIMITED 发明人 SAITO TETSUYA
分类号 H01L21/677;C23C16/44;H01L21/00;H01L21/205;H01L21/3065 主分类号 H01L21/677
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