| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical illumination device for achieving a desired ring band illumination, circular illumination, or the like, without essentially being affected by 0-th order beam from a diffraction optical element. <P>SOLUTION: The optical illumination device comprises the diffraction optical element 3 for converting luminous flux from a light source 1 to that of a prescribed light intensity distribution; an optical integrator 8, that is arranged between the diffraction optical element and a surface M to be irradiated with a light and forms an essential surface light source on an illumination pupil surface, based on the luminous flux from the diffraction optical element; shaping optical systems 4, 6, 7 that are arranged between the diffraction optical element and the optical integrator and change the size and shape of the essential surface light source; and an obstruction means that is arranged at a position essentially having Fourier Transform relationship with the diffraction optical element in the optical path of the shaping optical system and obstructs the advance of the 0th order light from the diffraction optical element along an illumination optical path. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
