| 摘要 |
PROBLEM TO BE SOLVED: To provide a catalyst-assisted chemical processing method which has a high processing efficiency and is suitable for processing in a spatial wavelength region of several 10μm or above by using a catalytic action which makes a chemical reaction possible without changing a reference surface. SOLUTION: A workpiece is placed in a processing liquid consisting of a halide acid which does not show a solubility with respect to the workpiece in an ordinary state. A catalyst 1 consisting of a platinum, gold, or ceramic solid-state catalyst is arranged in contact with or very close to a surface 2 to be processed of the workpiece. Halogen radicals generated by molecular dissociation of a hydrogen halide on the surface of the catalyst and surface atoms of the workpiece chemically react with each other by generating a halogenated compound. The workpiece is processed by solving out the halogenated compound. COPYRIGHT: (C)2006,JPO&NCIPI
|
