发明名称 POSITIONER DEVICE
摘要 A positioner (2) for moving a sample platform (6) relative to a base (4) is described. The positioner is driven by a piezoelectric element (8) arranged to expand and contract along a drive axis, the piezoelectric element has an input end coupled to the base and an output end coupled to first (14) and second (16) output levers extending away from the drive axis of the piezoelectric element in opposing directions. The output levers each have an inner arm arranged to be acted on by the piezoelectric element as it expands and an outer arm to which the sample platform is mounted via platform supports (26, 28). The output levers are mounted such that the piezoelectric element acts on the inner arms of the output levers to cause the outer arms to move in a plane containing the drive axis. This motion of the output levers is communicated via the platform supports to the sample platform, thus moving it relative to the base along a direction parallel to the drive axis.
申请公布号 WO2005081330(A3) 申请公布日期 2006.04.27
申请号 WO2005GB00320 申请日期 2005.01.31
申请人 THORLABS, INC.;DIXON, MICHAEL, JOHN;HERBERT, TERENCE, JAMES 发明人 DIXON, MICHAEL, JOHN;HERBERT, TERENCE, JAMES
分类号 H01L41/09;G12B5/00 主分类号 H01L41/09
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