| 摘要 |
PROBLEM TO BE SOLVED: To provide a development processor which is equipped with a plurality of treatment liquid tanks storing a developing treatment liquid, and conveys a sensitive material in the developing treatment liquid within the treatment liquid tanks and is further provided with a treatment rack moved to the treatment liquid tank on a downstream side wherein the amount of carry over of the development treatment liquid from the treatment liquid tank on the downstream side by the sensitive material to the treatment liquid tank on an upstream side can be more effectively reduced. SOLUTION: The development processor is provided with a cleaning mechanism 20 for flushing the stuck development treatment liquid from the sensitive material P held drawn up on the development treatment liquid by the treatment rack and a recovery mechanism 30 for recovering the stuck development treatment liquid flushed from the sensitive material P by the cleaning mechanism 20. COPYRIGHT: (C)2006,JPO&NCIPI
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