摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lithium aluminate substrate structure with a zinc oxide buffer layer, in which quantum confined Stark effect can be eliminated and the light emitting efficiency of an optical element can be improved. <P>SOLUTION: Lithium aluminate is selected as a substrate and a zinc oxide buffer layer 22 being a single crystal film is grown on a lithium aluminate substrate 21. Thus, zinc oxide is directed in the same direction, lattice matching is obtained, and excellent crystal interface quality can be provided by growing non-polar zinc oxide on the substrate 21 and utilizing the similarity between their structures. <P>COPYRIGHT: (C)2009,JPO&INPIT |