| 摘要 |
<p>The multi layer coating method is provided to remarkably shorten the time required for coating by forming differently forming the coating thickness on one substrate. The multi layer coating method comprises as follows. a) A step is for loading the substrate(GS) on the stage. b) A step is for forming the coating layer by coating the chemical solution(PR) in the substrate surface by the slit nozzle supported in a gantry moving on the substrate loaded on the stage. c) A step is for unloading the substrate with which the chemical solution is coated from the stage. In the b) step, various coating thicknesses of each region can be formed by controlling the discharged quantity of treatment fluid and the transition speed or the slit nozzle of the gantry.</p> |
