发明名称 OSCILLATING OBJECT RESTRAINING MECHANISM AND SUBSTRATE LAMINATING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide an oscillating object restraining mechanism which does not produce reactive force to the other axis. SOLUTION: An oscillating object restraining mechanism restrains the movement of an oscillating object 113 which moves along a spherical surface seat 111. The oscillating object restraining mechanism comprises a cut surface 119 with a cylindrical surface formed on the oscillating object 113 and a pushing member 115 having the leading end of which is in the shape of a spherical surface and coming into contact with the cut surface 119. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008294099(A) 申请公布日期 2008.12.04
申请号 JP20070136138 申请日期 2007.05.23
申请人 NIKON CORP 发明人 YOSHIHASHI MASAHIRO
分类号 H01L21/02 主分类号 H01L21/02
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