MEMS MIRROR AND WAVELENGTH SELECTION SWITCH

摘要

PROBLEM TO BE SOLVED: To provide a wavelength selection switch having a simple configuration which dispenses with a monitor optical system. SOLUTION: The wavelength selection switch has MEMS mirrors equipped with: a mirror which reflects light; a transmission type thin film photodiode which is arranged facing to the light-reflection side of the mirror and monitors the light intensity by passing a portion of the light emitted toward the mirror; and a mirror driving mechanism which tilts the surface of the mirror with respect to the optical axis of the light which is emitted toward the mirror to control the reflection direction of the light. COPYRIGHT: (C)2009,JPO&INPIT