| 摘要 |
PROBLEM TO BE SOLVED: To save a space of an arrangement place by using a device configuration conforming to the SEMI standard concerning a wafer sorter. SOLUTION: In at least one of carrier ports 20, 30 of the wafer sorter 1, a plurality of carrier stages 31, 131 and 231 are laminated vertically. Besides, the plurality of carrier stages 31, 131 and 231 are not only integrally and vertically moved in a vertical direction but also horizontally drawn out. Consequently, the arrangement place of the wafer sorter 1 is saved in space by the device configuration conforming to the SEMI standard. COPYRIGHT: (C)2009,JPO&INPIT
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