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发明名称
Vorrichtung zum Verdampfen von Metallen
摘要
申请公布号
DE19643843(B4)
申请公布日期
2008.11.27
申请号
DE19961043843
申请日期
1996.10.30
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
WENK, KARL-HEINZ
分类号
C23C14/22;C23C14/24
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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