| 摘要 |
PROBLEM TO BE SOLVED: To determine a refractive index of a step part of a transparent film covering the surface of a measured object and a physical film thickness from which an influence of the refractive index is removed, accurately at high speed by utilizing an interferometer. SOLUTION: Interference is generated by fluctuating relatively both irradiation distances, while irradiating the measured object and a reference surface with white light having a prescribed frequency band, and a surface image of the measured object is acquired by a CCD camera. Information of peak position of a light intensity value is determined relative to each pixel of the acquired image, and the surface height of the transparent film and the optical film thickness including an influence of a refractive index of the transparent film are determined from the determined peak position information, and a deviation of each optical film thickness of a prescribed domain and a domain adjacent to the domain is calculated, and assuming that the rear surface of the domain where a deviation is generated is flat, the refractive index and the physical film thickness are determined by utilizing measurement results of each surface height and each optical film thickness of both domains. COPYRIGHT: (C)2009,JPO&INPIT
|
