ION BEAM CONTROL APPARATUS AND METHOD

摘要

Provided are ion beam control apparatus and method for controlling an ion beam energy expansion level and an ion beam size in a moving radius direction. An ion beam control apparatus (Sa) is provided with an ion beam generating section (2), and an ion beam control section (1a) wherein a generated ion beam (IB) is inputted and controlled to be outputted with the prescribed level of energy expansion and the prescribed diameter in the moving radius direction. In the ion beam control section (1a), phase rotation by a high frequency electric field that increases existing probability with the prescribed level of energy is at least used.