Forming floating body RAM using bulk silicon substrate

摘要

A method for forming Z-RAM cells and the resulting semiconductor structure are provided. The semiconductor structure includes a semiconductor substrate; a dielectric layer on the semiconductor substrate; an opening in the dielectric layer, wherein the semiconductor substrate is exposed through the opening; a semiconductor strip on the dielectric layer and adjacent the opening; a gate dielectric over a surface of the semiconductor strip; a gate electrode over the gate dielectric; and a source/drain region in the semiconductor strip and adjacent the gate electrode.