| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL device, capable of appropriately responding to future enlargement of substrates or speed-up etc. for further improvement of production efficiency. SOLUTION: The manufacturing method of the organic electroluminescent device having an organic layer deposited on a substrate comprises the steps of: preparing film-forming sources 22a-22d which project a material for forming the organic layer, generating magnetic force from magnetic force-generating means 24a-24c that are disposed at positions facing the film-forming sources 22a-22d across the substrate but not contacting the substrate, attaching a mask plate made of a magnetic material closely to the substrate by a magnetic force generated by the magnetic force-generating means 24a-24c, and moving the substrate and the masking plate closely attached to each other while they face the film-forming sources 22a-22d to form the organic layer on the substrate through patterning film formation. COPYRIGHT: (C)2009,JPO&INPIT
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