发明名称 PLASMA GUN AND PLASMA GUN FILM FORMING APPARATUS PROVIDED WITH SAME
摘要 <p>A plasma gun (1) of the present invention includes: a container (72) having a plasma outflow opening (70); a cathode (18) which is disposed inside the container (72) to generate plasma by discharge; an auxiliary anode (31) which is disposed to be able to be located between the plasma outflow opening (70) and the cathode (18) and is able to receive the plasma generated by the cathode (18); an exhaust valve (26) for exhausting air from and sealing an inside of the container (72); and a plasma flow-out preventing/allowing device (30) which prevents the plasma, having been generated by the discharge of the cathode (18), from flowing out from the plasma outflow opening (70) and allows the plasma to flow out from the plasma outflow opening.</p>
申请公布号 EP1991037(A1) 申请公布日期 2008.11.12
申请号 EP20060796922 申请日期 2006.08.29
申请人 JP 发明人 JP;JP;JP
分类号 H05H1/24;C23C14/32 主分类号 H05H1/24
代理机构 代理人
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