| 摘要 |
<p>A flow rate sensor outputting a signal indicative of the flow rate of a fluid using a heating resistor and a temperature detecting member arranged along a flow path of the fluid has the following characteristics. The flow rate sensor includes a flow path substrate having a plurality of flow paths on one surface and a sensor substrate having a plurality of heating resistors and a plurality of temperature detecting members at locations corresponding to the plural flow paths. The sensor substrate is attached to the flow path substrate so that the heating resistors and the temperature detecting members come in contact with the fluid. In the flow rate sensor, a through-hole for thermal insulation is arranged between adjacent heating resistors in the sensor substrate.</p> |
