| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To materialize laser beam machining technique by which high energy efficiency can be secured while, compared with a hologram element, a simple and inexpensive mask is used as a beam branching means. <P>SOLUTION: The laser beam machining apparatus 10 is equipped with: a mask 16 having a plurality of openings 32 and branching in plurality a laser beam L outputted from a laser oscillator; a plurality of zoom imaging optical systems 18 that are installed for each opening 32 of the mask 16 and that converge with a prescribed reduction magnification each laser beam branched by passing through the mask; and a galvano scanner 28 that guides to the surface of the workpiece 42 each branched laser beam L1-Ln converged by each zoom imaging optical system 18. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
