ILLUMINATING OPTICAL DEVICE, DRAWING OPTICAL DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an illuminating optical device having a high degree of freedom with respect to a device layout.

SOLUTION: In the illuminating optical device for leading beams emitted from a light source to an illumination target, the illuminating optical device has: an enlarged image forming optical system disposed between the light source and the illumination target; and a reduction optical system disposed between the enlarged image forming optical system and the illumination target. The enlarged image forming optical system is constituted so as to form an image face between the light source and the illumination target, and has a larger magnification than unit magnification. The reduction optical system has a magnification which is less than unit magnification.

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