| 摘要 |
<p>The gases contng. hydrogen, hydrochloric acid gas and chlorosilane are entrained in an air stream and diluted in a ratio of at least 1 : 50, resulting in a hydrogen content of 4 vol %, before the water absorption treatment. Several processes can be served by one purification plant with substantially maintenance free operation. Explosion risks are reduced and the silica crystal structure is improved.</p> |
