摘要 |
An optical displacement measuring apparatus includes a light source, a collimate lens, a mirror, and a truncated cone shaped prism, and includes an imaging lens and a pinhole optical device for extracting light parallel to an optical axis of incident light from light returned from an object through the truncated cone shaped prism, and an optical position detector. The truncated cone shaped prism has optical properties of converting only light returned to a truncated conical circumference surface at a fixed angle corresponding to an apex angle into light parallel to an optical axis of incident light. The parallel light is offset from an optical axis of incident light in accordance with a displacement of the object relative to the truncated cone shaped prism. The optical position detector detects an offset amount to measure the displacement of the object.
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