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发明名称
Method for forming Metal-Insulator-Metal capacitor using damascene process
摘要
申请公布号
KR100865945(B1)
申请公布日期
2008.10.30
申请号
KR20020044925
申请日期
2002.07.30
申请人
发明人
分类号
H01L21/8242
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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