VORRICHTUNG UND VERFAHREN ZUR ABSCHEIDUNG EINES OXIDFILMS,申请号DE20036017814T-传众专利搜索

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发明名称	VORRICHTUNG UND VERFAHREN ZUR ABSCHEIDUNG EINES OXIDFILMS
摘要
申请公布号	DE60317814(T2)	申请公布日期	2008.10.30
申请号	DE20036017814T	申请日期	2003.10.08
申请人	APPLIED MATERIALS INC.	发明人	ANDERSON, ROGER N.;COMITA, PAUL B.;WALDHAUER, ANN;RILEY, NORMA B.
分类号	C23C16/40;C23C16/44;C23C16/458;C23C16/48;C23C16/52;C23C16/54;H01L21/316;H01L21/762	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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