| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively analyze a gas having passed through a heating chamber with an article arranged therein. SOLUTION: In this thermal desorption spectroscopy of analyzing a gas having passed through a heating chamber 174 with an article 173 arranged therein, the gas having passed through the heating chamber 174 is introduced into a discharge chamber with two electrodes for applying a voltage therebetween arranged therein, a signal according to a discharge condition between the two electrodes is obtained, and a desorption gas is analyzed based on the signal. COPYRIGHT: (C)2009,JPO&INPIT
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