| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device having a liquid discharge part, such as an ink discharge printer, a dye coater, a spin coater, a printer, and the like, and its cleaning method. SOLUTION: The coating device is equipped with a coating liquid storage tank, a liquid discharge part connected to the coating liquid storage tank through coating liquid piping, and a cleaning means in the coating liquid piping. The cleaning means comprises at least a drying gas supply means for supplying drying gas, a solvent supply means for supplying a plurality of solvents, a gas control means for controlling the flow rate of the drying gas, and a solvent control means for controlling the respective flow rates of a plurality of the solvents, The liquid discharge part is an ink discharge part. The gas and solvents are mixed just before introduction of a cleaning solvent into the coating liquid piping to form a gas-liquid mixed liquid containing large bubbles, and the cleaning means is equipped with a gas-liquid mixed liquid generating nozzle for forming a gas-liquid mixed liquid containing finer bubbles, and a coating liquid switching valve. COPYRIGHT: (C)2009,JPO&INPIT |
