CONTINUOUS ATMOSPHERIC HIGH TEMPERATURE FURNACE EQUIPMENT, CONTINUOUS MANUFACTURING METHOD OF NANO-CARBON AND BURNING AND GRAPHITIZING METHOD OF NANO-MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide continuous atmospheric high temperature furnace equipment having the excellent controllability for an atmospheric gas and being continuously operated and to provide a manufacturing method of a nano-carbon and a burning method and a graphitizing method of a nano-material using the equipment. SOLUTION: Mechanisms 3 and 7 for continuously supplying a substrate or a sample and a mechanism 4 for recovering the substrate or the sample after being treated are provided at the both ends of a high temperature furnace 1. A gas supplying part 5 for supplying the atmospheric gas is provided at a recovering part 6 and a gas discharging part is provided at a supplying part. A working efficiency of the high temperature furnace is improved by performing series of warming, heating and cooling while successively moving the substrate or the sample. A supplying box housing the supplying mechanism and a recovering box housing a recovering device become a closed space in connection with a furnace core tube, and air is extracted by evacuating and exchanged with the atmospheric gas and a forming reaction, burning and graphitization of the nano-material such as a carbon material can be performed in an oxygen-free atmosphere. COPYRIGHT: (C)2009,JPO&INPIT