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发明名称
SUPPORT MEMBER, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH THE SAME
摘要
申请公布号
KR100862703(B1)
申请公布日期
2008.10.10
申请号
KR20070009839
申请日期
2007.01.31
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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