THIN-FILM TEMPERATURE SENSOR, AND OUTGOING LINE CONNECTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To improve the connection strength between an electrode for composing a thin-film temperature sensor and a leader line. SOLUTION: The thin-film temperature sensor 1 comprises: an insulating substrate 11; a heat-sensitive film 12 formed on one surface of the insulating substrate 11; a pair of electrode films 13 connected to the heat-sensitive film 12 electrically; a bump 14 formed on the pair of electrode films; and the leader line 15 connected to the bump electrically. The bump 14 is formed by a well known wire bump technique. The size of the bump is made larger than the diameter of the leader line 15. COPYRIGHT: (C)2009,JPO&INPIT