发明名称 DROPLET EJECTION HEAD, DROPLET EJECTION DEVICE, AND METHOD OF MANUFACTURING ELECTRODE SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a droplet ejection head having a number of nozzles, which sets a time constant of a driving circuit of a liquid ejecting actuator to a smaller value to reduce delay of droplet ejection operation. SOLUTION: The droplet ejection head is formed of: a nozzle substrate 5 which has formed therein the plurality of nozzle holes 16 for ejecting droplets; a cavity substrate 3 which has formed therein a plurality of ejection chambers 12 each having a bottom wall as a vibration plate 11 serving as an electrode and functioning to eject a droplet from the nozzle hole 16; and an electrode substrate 2 which has a plurality of individual electrodes 7 each being formed in a first groove 6a, opposed to the vibration plate 11 via a gap, for driving the vibration plate 11, a driver IC 20 for controlling driving of the individual electrodes 7, and input wires 25 formed in second grooves 6b, for inputting power for driving the driver IC 20 or signals from outside. Herein the second groove 6b formed in the electrode substrate 2 is deeper in depth than the first electrode 6a, and a conductor of the input wire 25 is thicker in thickness than the individual electrode 7. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008238782(A) 申请公布日期 2008.10.09
申请号 JP20070086777 申请日期 2007.03.29
申请人 SEIKO EPSON CORP 发明人 MATSUNO YASUSHI;FUJISAWA SATOSHI
分类号 B41J2/045;B41J2/055;B41J2/16 主分类号 B41J2/045
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