| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion irradiating device capable of detecting a glitch at a low cost while being comparatively down-sized. SOLUTION: A wall shaped magnetic body member surrounding an ion beam is arranged on a route of the ion beam, and so as to surround a magnetic field formed inside the magnetic member by an ion beam electric current, a coil is formed by winding around a conductive wire in one part of the magnetic member. The size of induced electromotive force generated in this coil accompanied with changes of the magnetic field caused by fluctuations of the ion beam current is measured, and based on the size of the induced electromotive force measured by an induced electromotive force measuring part, temporary fluctuations of the ion beam current is detected. COPYRIGHT: (C)2009,JPO&INPIT
|
