发明名称 WAVELENGTH CONVERTER, ULTRAVIOLET LASER DEVICE AND LASER PROCESSOR
摘要 PROBLEM TO BE SOLVED: To obtain a wavelength converter with which an optical device for wavelength separation for separating wavelength is arranged outside the wavelength converter, which solves the problems that impurity and organic gas contained in the atmosphere adhere to coating for wavelength separation evaporated on the surface of the optical device for wavelength separation, the adhered impurity, etc. become an absorption center of ultraviolet laser light with high energy, the coating for wavelength separation is damaged and deteriorated, in which it is not necessary to arrange the optical device for wavelength separation outside a sealed container and with which deterioration in the coating for wavelength separation is reduced. SOLUTION: The wavelength converter is provided with the sealed container 3 which stores wavelength conversion crystal 2 for converting wavelength of incident laser light into wavelength of the ultraviolet laser light and is provided with wavelength separation coating 9 on the surface positioned on the incident side of the laser light from the wavelength conversion crystal 2 in a laser emission window 5 arranged in the sealed container 3. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008242184(A) 申请公布日期 2008.10.09
申请号 JP20070084048 申请日期 2007.03.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 KATSURA TOMOTAKE;KUROSAWA MITSUKI
分类号 G02F1/35 主分类号 G02F1/35
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