| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor for improving the air-tightness of the joint surface of a heat transmission plate and a pressure board. SOLUTION: An annular protrusion 8 having a forked tip is formed on the joint surface of a first plate 2 of a susceptor 1, and an annular groove 9 whose cross-section is shaped like an inverse trapezoid is formed at a position where the second plate 3 faces the annular protrusion 8 of the joint surface. The annular protrusion 8 is fit into the annular groove 9, and engaged by adding pressure. COPYRIGHT: (C)2009,JPO&INPIT |
