| 摘要 |
PROBLEM TO BE SOLVED: To reduce installation errors of an element by detecting the tilt of the element, using transmitted light. SOLUTION: This detector for detecting the tilt of the element 1 has a holding means 10 for holding the element 1 and changing the tilt of the element 1, an irradiation means 2 for irradiating the element 1 with detection light and a measuring means 3 for detecting the detection light transmitted through the element 1, to measure the characteristics of the detected light and further, has an arithmetic means 40 for calculating the tilt of the element 1 with respect to the optical axis of the detection light, on the basis of a change in the output value of the measuring means 3. COPYRIGHT: (C)2009,JPO&INPIT
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