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发明名称
摘要
申请公布号	JP4159213(B2)	申请公布日期	2008.10.01
申请号	JP19990326705	申请日期	1999.11.17
申请人		发明人
分类号	H01L21/60;H05K1/18	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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