发明名称 |
Measuring apparatus for work held by chuck table, and laser beam machining apparatus |
摘要 |
An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source; a beam splitter which is disposed between the white light source and the chromatic aberration lens and by which a reflected beam of the white beam irradiating the work therewith is split; a first condenser lens for condensing the reflected beam split by the beam splitter; a diffraction grating by which the reflected beam condensed by the first condenser lens is converted into a diffracted beam; a second condenser lens for condensing the diffracted beam diffracted by the diffraction grating; and a wavelength detecting unit for detecting the wavelength of the diffracted beam condensed by the second condenser lens.
|
申请公布号 |
US7428062(B2) |
申请公布日期 |
2008.09.23 |
申请号 |
US20080006530 |
申请日期 |
2008.01.03 |
申请人 |
DISCO CORPORATION |
发明人 |
NOMARU KEIJI |
分类号 |
G01B11/24;G02B21/00;G03B21/14 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|