APPARATUS FOR INSPECTION OF SEMICONDUCTOR DEVICE AND METHOD FOR INSPECTION BY THE SAME

摘要

An apparatus for inspection of semiconductor device and method for inspection by the same are disclosed. The apparatus for inspection of semiconductor device includes air cleaners and a brush cleaner to automatically remove contaminants present on the exterior of the semiconductor devices, prior to performing vision inspections using the vision inspecting device, thereby reducing the number of semiconductor devices which have been determined to be defective due to contaminants, and consequently, improving a yield of semiconductor devices.