发明名称 |
Optical inspection apparatus and optical inspection method |
摘要 |
An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.
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申请公布号 |
US7423745(B2) |
申请公布日期 |
2008.09.09 |
申请号 |
US20050230329 |
申请日期 |
2005.09.20 |
申请人 |
NEC CORPORATION |
发明人 |
MORIBE HIDEYUKI;TATENO MOTONARI |
分类号 |
G01N21/00;G01B11/24;G01N21/956;G03F1/32;G03F1/84;H01L21/027 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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