发明名称 DEVICE AND METHOD FOR SUPPLYING DRYING AGENT
摘要 An apparatus for supplying a drying agent is provided to improve stability and reliability by preventing an overload of a vibrator. A storage tank stores a liquefied drying agent. A waterproof member is positioned in the liquefied drying agent in order to form a sealed space. A plurality of vibrators are formed adjacently to a lower part of a water surface of the liquefied drying agent. A gas supply unit injects a gas from the inside of the liquefied drying agent. Each of the vibrators is positioned in the inside of the waterproof member. A barrier rib is formed to divide an upper space of the waterproof member corresponding to each of the vibrators.
申请公布号 KR100856332(B1) 申请公布日期 2008.09.04
申请号 KR20070049274 申请日期 2007.05.21
申请人 K.C.TECH CO., LTD. 发明人 KANG, SHIN JAE
分类号 H01L21/304 主分类号 H01L21/304
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